Type

• Flood Exposure Sources(27)
• Substrate Holders(6)
• Photomask Holders(6)
• Wafer Holders(5)
• Calibrated Probes(4)
• Vacuum Pumps(2)

• Precision Slide Assemblies(2)
• Viewing Systems(1)
• Power Meter(1)
• Mask Alignment Fixtures(1)
• Filter Mounts(1)
• Filter(1)
• Extended Care Plan(1)

Lamp Type

• 1000 W Hg(Xe)(15)
• 500 W Hg(Xe)(8)
• 500 W Hg(4)

Beam Size

• 54 x 54 mm(6)
• 203 x 203 mm(6)
• 152 x 152 mm(6)
• 108 x 108 mm(6)
• 254 x 254 mm(3)

Collimation

• ± 6.6°(3)
• ± 4.6°(3)
• ± 3.8°(3)
• ± 2.6°(3)
• ± 2.5°(3)
• ± 2.0°(3)

• ± 1.8°(3)
• ± 1.6°(3)
• ± 1.4°(3)

Working Distance

• 5.5 in. ( 140 mm )(6)
• 4 in. ( 101 mm )(6)
• 3 in. ( 76 mm )(6)
• 2 in. ( 51 mm )(6)
• 7 in. ( 178 mm )(3)

Typical Output

• 17 mW cm^-2(3)
• 9 mW cm^-2(1)
• 87 mW cm^-2(1)
• 8,4 mW cm^-2(1)
• 8 mW cm^-2(1)
• 76 mW cm^-2(1)

• 64 mW cm^-2(1)
• 59 mW cm^-2(1)
• 43 mW cm^-2(1)
• 4,9 mW cm^-2(1)
• 4 mW cm^-2(1)
• 38 mW cm^-2(1)
• 35 mW cm^-2(1)
• 34 mW cm^-2(1)
• 305 mW cm^-2(1)
• 3,5 mW cm^-2(1)
• 3 mW cm^-2(1)
• 28 mW cm^-2(1)
• 266 mW cm^-2(1)
• 25 mW cm^-2(1)
• 224 mW cm^-2(1)
• 22 mW cm^-2(1)
• 18 mW cm^-2(1)
• 121 mW cm^-2(1)
• 12 mW cm^-2(1)

Size

• 4 x 4 x 0.060 in.(2)
• 3 x 3 x 0.060 in.(2)
• 2 x 2 x 0.060 in.(2)
• 7 x 7 x 0.090 in.(1)
• 6 x 6 x 0.090 in.(1)
• 6 x 6 x 0.025 in.(1)

• 6 in.(1)
• 5 x 5 x 0.090 in.(1)
• 5 x 5 x 0.060 in.(1)
• 5 in.(1)
• 4 in.(1)
• 3 in.(1)
• 2 in.(1)
• 1 x 1 x 0.060 in.(1)

Price

• $500 - $750(12)
• $750 - $1000(1)
• $1000 - $1500(6)
• $1500 - $2000(3)
• $2000 - $3000(6)
• $3000 - $4000(1)

Availability

• In Stock(6)
• 3 Weeks(1)
• 5 Weeks(5)
• 6 Weeks(1)
• 7 Weeks(8)
• 8 Weeks(6)

• 13 Weeks(1)