Motorized Axes

• X(46)
• X, Y(29)
• Y(28)
• Z(12)
• X, Y, Z(12)
• Y, Z(10)

• X, Z(10)
• X, Y, Z, Θx, Θy(4)
• X, Y, Θx, Θy(2)
• X, Y, Z, Θx, Θy, Θz(2)

Travel Range

• 1.0 in. ( 25.4 mm )(67)
• 0.5 in. ( 12.7 mm )(65)
• 100 mm(31)
• 200 mm(28)
• 150 mm(28)
• 250 mm(24)

• 25 mm(16)
• 6.5 mm(14)
• 50 mm(12)
• 300 mm(12)
• 0.1 mm(11)
• 0.2 mm(9)
• 600 mm(8)
• 500 mm(8)
• 400 mm(8)
• 0.118 in. ( 3 mm )(8)
• 800 mm(4)
• 1200 mm(4)
• 0.4 mm(4)
• 1000 mm(3)
• 27 mm(2)
• 12 mm(2)
• 70 mm(1)
• 350 mm(1)
• 210 mm(1)
• 160 mm(1)
• ( 100 mm )(1)

Travel, Angular

• 8 °(6)
• 4 °(2)

Minimum Incremental Motion, Linear

• <30 nm(89)
• 1 μm(46)
• 0.3 μm(35)
• 0.02 μm(19)
• 0.1 μm(17)
• <100 nm(14)

• 0.01 μm(11)
• 30 nm(8)
• 10 nm(6)
• 0.5 μm(3)
• 0.05 μm(2)
• 0.2 μm(1)

Maximum Speed

• 100 mm/s(31)
• 500 mm/s(25)
• 50 mm/s(22)
• 200 mm/s(16)
• 2 mm/s(16)
• 20 mm/s(14)

• 0.2 mm/s(14)
• 25 mm/s(12)
• 40 mm/s(11)
• 1 mm/s(11)
• 4 mm/s(8)
• 300 mm/s(5)
• 10 mm/s(3)
• > 0.5 mm/s(3)
• 2.5 mm/s(2)
• 1 mm / min(2)
• 1.25 mm/s(1)
• 0.4 mm/s(1)
• 0.3 mm/s(1)

Resolution

• 0.5 μm(73)
• 0.1 μm(61)
• 1 μm(34)
• 0.005 μm(30)
• 1.25 μm(16)
• 5 nm(6)

• 0.001 μm(5)
• 80 nm(4)
• 0.05 μm(2)
• 0.0175 μm(2)
• 0.00757 μm(2)

Resolution- Angular

• θ_x, θ_y≤0.7 μrad(6)
• θ_x, θ_y, θ_z≤0.2 μrad(2)

On-Axis Accuracy

• 5 or ± 2.5 μm(88)
• 15 or ± 7.5 μm(18)
• 9 or ± 4.5 μm(10)
• 4 or ± 2 μm(8)
• 5 μm(6)
• 3 or ± 1.5 μm(6)

• 20 or ± 10 μm(6)
• 2.0 or ± 1.0 μm(6)
• 6.0 or ± 3.0 μm(4)
• 6 or ± 3 μm(4)
• 30 or ± 15 μm(4)
• 3 μm(4)
• 2.0 μm(4)
• 2 or ± 1 μm(4)
• 25 or ± 12.5 μm(3)
• 1.5 or ± 0.75 μm(3)
• 8 or ± 4 μm(2)
• 7 or ± 3.5 μm(2)
• 3.0 or ± 1.5 μm(2)
• 2 μm(2)
• 13 or ± 6.5 μm(2)
• 11 or ± 5.5 μm(2)
• 10 or ± 5 μm(2)
• 8.0 or ± 4.0 μm(1)
• 6.5 or ± 3.25 μm(1)
• 5.5 or ± 2.25 μm(1)
• 4.5 or ± 2.25 μm(1)

Uni-directional Repeatability, Guaranteed

• 1.5 μm(94)
• 1.25 μm(16)
• 1 μm(15)
• 0.4 μm(10)
• 0.5 μm(9)
• 0.45 μm(6)

• 0.3 μm(4)
• 0.05 μm(4)
• 0.2 μm(1)
• 0.07 μm(1)

Price

• Less than $50(2)
• $50 - $100(5)
• $100 - $200(1)
• $200 - $300(1)
• $400 - $500(1)
• $500 - $750(4)

• $750 - $1000(20)
• $1000 - $1500(35)
• $1500 - $2000(62)
• $2000 - $3000(60)
• $3000 - $4000(39)
• $4000 - $5000(21)
• $5000 - $10000(115)
• $10000 - $15000(33)
• $15000 - $20000(4)

Availability

• In Stock(91)
• 2 Weeks(2)
• 3 Weeks(48)
• 4 Weeks(69)
• 5 Weeks(140)
• 6 Weeks(25)

• 7 Weeks(4)
• 8 Weeks(3)
• 9 Weeks(6)
• 10 Weeks(11)
• 13 Weeks(1)