Air Bearing Solutions

Designed for 300mm wafer test, measurement, and processing applications, the DynamYX® 300 Wafer Positioning Stage features a simple, 3-piece architecture in a two motor design that provides a cost effective solution ... Read More

DynamYX Datum air-bearing stage is the result of Newport’s continuous investment in advanced materials, proprietary manufacturing techniques, and meticulous structural analysis and design. Datum provides the accuracy ... Read More

The DynamYX^® GT air-bearing stage is intended for high-throughput applications with aggressive duty-cycles. Featuring an extremely rigid structure and high load capacity air bearings, it provides up to 2G ... Read More

The DynamYX RS Reticle Positioning Stage is designed for reticle inspection and repair applications. It features an extremely rigid ceramic reticle holder that is mounted to a single plane air bearing carriage. The ... Read More

The HybrYX^TM single plane XY hybrid air-bearing stage offers the advantages of a single plane air bearing stage at a much lower cost. The HybrYX G5 provides the advantages of a single plane architecture in ... Read More

HybrYX® is a single plane XY hybrid air-bearing stage offers the advantages of a single plane air bearing stage at a much lower cost. HybrYX is well suited for semiconductor wafer inspection systems as well as being ... Read More

The Proprietary SiC ceramic beam used in the SinguLYS B-Series Bridge is 3 times lighter than steel and offers triple the stiffness of granite. These properties have allowed our customers to increase throughput in ... Read More

Newport's SinguLYS S-Series stage features ceramic components similar to those found in the DynamYX and HybrYX families. The light-weight carriage with integrated pressure-vacuum elements is guided by a precisely ... Read More