The 97437 Flood Exposure Source is a 500 Watt source for the near UV (350 - 450 nm) spectral range. NUV sources run an Hg lamp, use a N-BK7 glass lens (which does not transmit below 350 nm), and have the appropriate dichroic mirrors. NUV is designed to expose most photoresists. This illuminators irradiates samples with a 8 x 8 inch (203 x 203 mm) collimated beam with a ± 1.4° collimation angle. Tyipical output is 22 mW cm-2. An efficient ellipsoidal reflector, coated with AlSiO for the NUV collects up to 70% of the arc lamp output. A 45° primary dichroic mirror spectrally reflects the light after passing through a proprietary design beam homogenizer. The homogenizer, or optical integrator, is similar to a compound fly's eye. It scrambles the arc lamp's non-uniform irradiance to produce many diverging beams. These diverging beams overlap at the collimating lens to produce a highly uniform, collimated beam at the work plane.
|Type||Flood Exposure Sources|
|Lamp Type||500 W Hg|
|Beam Size||203 x 203 mm|
|Working Distance||5.5 in. (140 mm)|
|Typical Output||22 mW cm-2|